High-temperature tensile behavior of freestanding Au thin films
نویسنده
چکیده
The mechanical behavior of freestanding thin sputter-deposited films of Au is studied at temperatures up to 340°C using tensile testing. Films tested at elevated temperatures exhibit a significant decrease in flow stress and stiffness. Furthermore the flow stress decreases with decreasing film thickness, contravening the usual notion that “smaller is stronger”. This behavior is attributed mainly to diffusion-facilitated grain boundary sliding.
منابع مشابه
Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS
An electroplating spring-bridge micro-tensile specimen is fabricated to carry out a series of monotonic tensile testing on it. Freestanding thin films were loaded by performing monotonic loading/unloading and tensiontension fatigue experiments. Loading was applied using a piezoelectric actuator with 0.1 μm resolution connected through pin hole into the test chip specimen. Loads were measured by...
متن کاملUltra Low Cycle Fatigue of Axisymmetric Freestanding Nanoscale Gold Films
We present ultra low-cycle fatigue experiments of axisymmetric nano-crystalline gold films of nano-thickness deformed by a spherical indenter using a recently developed freestanding membrane test. Freestanding membranes of gold were centrally deflected using a spherical indenter attached to a MEMS load cell. Fabrication of the films for these experiments yielded films 100 nm thick and 500 μm in...
متن کاملBauschinger effect in unpassivated freestanding nanoscale metal films
We show experimentally that unpassivated freestanding nanoscale metal films, subjected to uniaxial tension, show substantial Bauschinger effect (BE) during unloading, even at large overall tensile stresses. Aluminum films (thickness 200–400 nm, grain size 200 nm) show BE at stresses as high as 150 MPa and their plastic strain after unloading is often less than 50% of the expected value. In gold...
متن کاملGrain-size stabilization by impurities and effect on stress-coupled grain growth in nanocrystalline Al thin films
Room-temperature tensile experiments on sub-micrometer freestanding thin films deposited at varied base pressures reveal two distinct classes of mechanical response. Samples that contain sufficient impurity concentrations to stabilize the microstructure against an applied stress show strong but brittle response. However, films that were deposited at lower vacuum base pressures that still allow ...
متن کاملOn-chip Testing and Properties of MEMS Materials: Size Scale Effects
Market needs in the micro-electronics industry require the production of devices with increasing performance based on the continuous reduction of the characteristic dimensions of the main components. Therefore, in the last decade many efforts in the scientific community have focused on understanding how the material mechanical behavior changes at small scales, particularly at structural dimensi...
متن کامل